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本文研究了微波等离子体合成金刚石薄膜的工艺参数对成核和生长过程的影响。讨论了表面过程机理,找出了较佳工艺条件,合成出直径为φ23毫米晶形完整、均匀致密的金刚石薄膜。
In this paper, the effects of microwave plasma on the nucleation and growth of diamond films were investigated. The surface process mechanism was discussed, and the better process conditions were found out to synthesize a complete and uniform diamond film with a diameter of φ23 mm.