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以铁酸铋(BiFeO_3,BFO)作为压力敏感材料,利用其压电特性,将通过静电纺丝法制备的纳米纤维与光刻、溅射、干法刻蚀等MEMS加工工艺制备的硅基底片相结合,设计工艺流程并制备了BFO纳米纤维压电式压力传感器,得到质量较高的传感器样片.分析工艺流程,得到工艺顺序为先刻蚀硅腔260μm,接着制备电极,再刻蚀硅腔90μm,最后纺丝纳米纤维;在一定条件下纤维取向最优的实验参数是推进速度、电压、接收距离和极板间距分别为0.3 m L/h、19 k V、14 cm和10 cm,为铁电材料在微器件上的应用提供了参考.
Using bismuth ferrite (BiFeO_3, BFO) as the pressure-sensitive material, the piezoelectric properties of the nanofibers prepared by electrospinning were compared with those of the silicon substrate prepared by MEMS processing such as photolithography, sputtering and dry etching The BFO nanofiber piezoelectric pressure sensor was designed and the high quality sensor sample was obtained.Analyzing the process flow, the process sequence was as follows: the first etching silicon cavity was 260μm, then the electrode was prepared and then the silicon cavity was etched 90μm , And finally spinning nanofibers. The optimal experimental parameters of fiber orientation under certain conditions were propulsion velocity, voltage, receiving distance and plate spacing of 0.3 m L / h, 19 k V, 14 cm and 10 cm respectively. The application of electrical materials on micro-devices provides a reference.