环形偏转器的偏转磁场

• 作 者: 邵健中 季阳阳 王严梅
• 机 构: 浙江大学信电系,浙江大学信电系,浙江大学信电系
• 出 处: 微细加工技术
• 发表日期: 1988年02期
• 关键词: 偏转器 铁芯材料 磁铁芯 铁钴钒合金 高磁导率 磁标位 扫描电子显微镜 壳层 逐点测量 正弦分布

一、引言在扫描电子束仪器内,大多采用结构简单和容易加工制作的环形偏转线包产生的偏转磁场,使电子束发生偏转扫描。为了使磁场集中在线包所包围的空间内,并为了提高磁场强度以增大偏转灵敏度,通常总是把线包绕在具有高磁导率的环形软磁铁芯上,成为环形偏转器。铁芯的截面都是矩形。铁芯材料选用适于在弱磁场内工作的铁钴钒合金

I. INTRODUCTION In the scanning electron beam instrument, the deflection magnetic field generated by the annular deflection line package which is simple in structure and easy to manufacture is mostly used to make the electron beam deflect and scan. In order to concentrate the magnetic field in the space surrounded by the wire pack and to increase the magnetic field strength to increase the deflection sensitivity, the wire is always wrapped around a ring-shaped soft magnetic core with a high magnetic permeability to become a ring-shaped deflector. The cross section of the core is rectangular. Iron core material suitable for use in the weak magnetic field of iron cobalt vanadium alloy