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我厂在伟大领袖毛主席制订的“鞍钢宪法”指引下,采用三结合的方式进行了气相沉积氮化钛的试验工作,取得了一些效果,现将情况简介于下: 一、气相沉积的机理所谓气相沉积,就是利用氩气、氮气、氢气等作载气,将金属卤化物的蒸气带入反应室,在高温进行化学反应,然后在高温的金属表而沉积上一层固相生成物的工艺方法。采用这种方法可以得到多种多样的沉积层,如碳化钛、碳化铌、氮化钛、氮化锆、氮化钒等等,现仅以用氢气、氮气、四氯化钛为原料的氮化钛气相沉积为例,简略地叙述一下反应过程。该反应过程可分为两个阶殴来讨论。第一阶段以置换和还原的方式获得金属钛:
Under the guidance of the “Anshan Iron and Steel Constitution” elaborated by the great leader Chairman Mao, our factory has carried out the experiment of vapor-depositing titanium nitride by the triple combination method and achieved some results. The briefing is as follows: I. Mechanism of Vapor Deposition The so-called vapor deposition is the use of argon, nitrogen, hydrogen, etc. as a carrier gas, the metal halide vapor into the reaction chamber, the chemical reaction at high temperatures, and then deposited on a high temperature metal surface layer of solid product Process method. This method can be obtained by a variety of sedimentary layers, such as titanium carbide, niobium carbide, titanium nitride, zirconium nitride, vanadium nitride and so on, now only with hydrogen, nitrogen, titanium tetrachloride as raw material nitrogen Titanium vapor deposition as an example, a brief description of the reaction process. The reaction process can be divided into two steps to discuss. The first stage to replace and restore the way to obtain titanium metal: