论文部分内容阅读
提出采用功率谱密度(PSD)的方法来描述光学元件的“缺陷”分布状况.以数目巨大的微米量级振幅调制型缺陷为例,基于统计思想,得到了光学元件“缺陷”分布等效PSD的求法,并验证了等效求法的合理性.
(PSD) method was proposed to describe the “defect” distribution of optics.An example of a large number of AM amplitude modulation defects was given based on statistical theory, Distribution of equivalent PSD method, and verify the reasonableness of the equivalent method.