论文部分内容阅读
:基于现有的硅基 Pb(Zr,Ti) O3 (PZT)铁电薄膜的制备工艺 ,提出了一种用于微麦克风和扬声器的新型 PZT悬臂式振膜结构。对这种悬臂结构的结构参数进行了优化设计 ,并对其灵敏度和声输出进行了理论分析。结果表明采用这种 PZT悬臂式结构的微麦克风和扬声器的性能有望超过以往文献中报道过的微麦克风和扬声器。
: Based on the preparation of the existing silicon-based Pb (Zr, Ti) O3 (PZT) ferroelectric thin film, a novel PZT cantilever diaphragm structure for microphones and loudspeakers is proposed. The structural parameters of the cantilever structure were optimized, and the sensitivity and acoustic output were analyzed theoretically. The results show that microphones and speakers using this PZT cantilever structure are expected to outperform microphones and loudspeakers reported in the literature.