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近场扫描光学显微术中,近场距离的检测和控制是需要解决的核心技术之一 本文研究了基于DDS驱动的压电传感器,在一个压电陶瓷片上,电极被分成相同的两部分,分别用于振动驱动和振幅检测 近场扫描的光纤探针固定于此压电陶瓷片上 振动驱动信号采用DDS,在样品的远场时,可以通过频率扫描得到误差在0. 006Hz以内的压电陶瓷片谐振频率驱动信号,而当光纤探针处于样品的近场距离之内时,压电陶瓷片的谐振频率偏离驱动信号频率,振幅明显减小,从而检测出近场距离 高精度振动驱动源DDS和高灵敏度压电传感器的采用提高了检测灵敏度和工作稳定性。
Near-field scanning optical microscopy, the detection and control of near-field distance is one of the core technologies to be solved In this paper, based on DDS-driven piezoelectric sensors, the electrode is divided into two parts on a piezoelectric ceramic sheet, Respectively for vibration-driven and amplitude detection Near-field scanning fiber probe fixed to the piezoelectric ceramic vibration signal using DDS in the far field of the sample can be obtained by frequency scanning error within 0.006Hz piezoelectric ceramic Chip resonant frequency drive signal, and when the fiber probe is within the sample near-field distance, the piezoelectric ceramic resonant frequency deviates from the frequency of the driving signal amplitude significantly reduced to detect the near-field distance high-precision vibration drive source DDS And the use of high-sensitivity piezoelectric sensors to improve the detection sensitivity and work stability.