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研究了分别以H2 C2 O4 、HNO3、HCOOH和CH3COOH作稳定剂的LiNbO3薄膜先驱液的稳定性 ,发现H2 C2 O4 作稳定剂的先驱液的稳定性最好 ;用sol gel法在Si(110 )基板上制备了以H2 C2 O4 作稳定剂的LiNbO3薄膜 ,并对LiNbO3薄膜进行了IR、XRD和SEM表征 ,结果表明 ,生成的LiNbO3为多晶 ,与HNO3相比 ,以H2 C2 O4 作稳定剂制备的LiNbO3薄膜形貌较差。
The stability of precursors of LiNbO3 thin films with H2 C2 O4, HNO3, HCOOH and CH3COOH respectively as stabilizers was studied. The stability of the precursors of H2 C2 O4 as stabilizer was found to be the best. LiNbO3 thin films with H2 C2 O4 as stabilizers were prepared on the substrate. The LiNbO3 thin films were characterized by IR, XRD and SEM. The results showed that LiNbO3 was polycrystalline. Compared with HNO3, H2O2 O4 was used as stabilizer The prepared LiNbO3 film has poor morphology.