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射频(RF)滤波器在4G移动通信(如Band 40波段)中具有广泛应用。描述了基于薄膜体声波谐振器(FBAR)技术的RF滤波器的设计和制作方法。体声波滤波器是由FBAR以T型结构级联的方式实现的。在滤波器的设计过程中,为了使仿真结果更接近于实际情况,采用考虑电极和衬底间耦合效应的改进的Mason模型对FBAR进行性能仿真和优化。最后,在8英寸(1英寸=2.54 cm)CMOS工艺线上对此滤波器进行了流片。测试结果表明,Band 40波段的体声波滤波器具有低的通带插入损耗(小于3 dB)、高的带外抑制(大于40 dB)和快速滚降特性。
Radio Frequency (RF) filters are widely used in 4G mobile communications such as the Band 40 band. Describes the design and fabrication of RF filters based on thin film bulk acoustic resonator (FBAR) technology. BAW filters are implemented as T-type cascades. In the process of designing the filter, in order to bring the simulation result closer to the actual situation, the improved Mason model considering the coupling effect between electrode and substrate is used to simulate and optimize the performance of FBAR. Finally, the filter was streamed on an 8 inch (1 inch = 2.54 cm) CMOS process line. Test results show that Band 40 band BAW filters have low passband insertion loss (less than 3 dB), high out-of-band rejection (> 40 dB), and fast roll-off characteristics.