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一、前言近年来,采用离子注入技术对材料改性研究工作在工业发达国家取得了很大发展。它与其它表面处理技术比较起来具有许多独特的优点。离子注入金属,可使其表面硬度、耐磨性、耐腐蚀性和抗疲劳性大幅度提高。这种技术就是将所要注入的元素,经电离后在高压电场下加速,再经磁分析器提纯,在真空靶室内注入到待处理的工件表面内。这样,不形成新的界面,
I. Introduction In recent years, ion implantation technology for material modification research work in industrialized countries has made great progress. It has many unique advantages over other surface treatment technologies. Ion implantation of metal, can make its surface hardness, abrasion resistance, corrosion resistance and fatigue resistance greatly improved. This technique is to inject the elements to be accelerated by high voltage electric field after ionization and then be purified by a magnetic analyzer to be injected into the surface of the workpiece to be processed in a vacuum target chamber. In this way, do not form a new interface,