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介绍了金属有机气相沉积 (MOCVD)制备Mo2 C膜的过程和对膜表面粗糙度的测量结果 ;在测量基础上进行统计 ,找出Mo2 C膜的高差分布 ;应用非平衡统计理论导出表面高差分布公式 .结果表明实际测量与理论推导结果一致 .
The process of preparing Mo2 C film by metal organic vapor deposition (MOCVD) and the measurement results of the surface roughness of the film are introduced. Based on the measurement, statistics are made to find out the height difference distribution of Mo2 C film. The surface height Difference distribution formula.The results show that the actual measurement and the theoretical derivation results.