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本文分析了磁控管内冷阴极放电的特性,提出了利用管内自持汤生放电的原理来测量磁控管管内残余气体的总压强,通过对几种管型的磁控管放电特性的测试,确定了最佳工作电压 ,比较了不同条件的放电特性。这种方法可在10~(-2)～10~(-7)乇的 范围内利用磁控管本身来确定其管内的总压强。放电特性线性良好,灵敏度为1A/乇,有较好的重复性。文中也提出了降低测量下限的一些设想,最后介绍了一台磁控管内残余气体总压强测试仪。
In this paper, the characteristics of cold cathode discharge in magnetron are analyzed, and the principle of using self-sustained discharge in tube is proposed to measure the total pressure of the residual gas in magnetron tube. By testing the magnetron discharge characteristics of several tubes, Determine the best working voltage, compare the discharge characteristics of different conditions. In this method, the magnetron itself can be used to determine the total pressure in the tube in the range of 10 -2 to 10 -7 Torr. Discharge characteristics of a good linearity, the sensitivity of 1A / Torr, a better repeatability. The paper also put forward some ideas to reduce the lower limit of measurement, and finally introduced a residual magnetron total pressure tester.