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研制了一台零电压软开关中频交流脉冲放电电源,应用于碳纳米管的制备,以乙炔作为碳源,在反应容器中通入氦气,在两电极之间激发出电弧为碳纳米管生长提供环境。本文给出了交流脉冲电源的设计思路和实现方案。该电源采用三相桥式不可控整流拓扑电路、PWM整流电路、半桥逆变电路的方案。根据放电过程中电流急剧上升的特点,绕制了具有高漏感的变压器,利用变压器漏感来抑制放电过程电流上升的速率,同时实现了IGBT的零电压开通。该电源输出峰值电压5kv-12kv连续可调,频率为8k Hz,脉宽占空比16%~20%可调。通过对放电试验结果的观测,此电源各项指标运行正常,工作稳定,电磁干扰小,具有良好的应用价值。
A zero-voltage soft-switching medium frequency AC pulse discharge power supply was developed for the preparation of carbon nanotubes. Using acetylene as a carbon source, helium was introduced into the reaction vessel to excite an arc between the two electrodes for the growth of carbon nanotubes Provide the environment. This article gives the design idea and realization scheme of AC pulse power supply. The power supply using three-phase bridge uncontrollable rectifier topology circuit, PWM rectifier circuit, half-bridge inverter circuit program. According to the characteristics of rapid increase of current in the discharge process, a transformer with high leakage inductance is wound and the leakage inductance of the transformer is used to suppress the rate of current rise in the discharging process. At the same time, zero-voltage switching of the IGBT is realized. The power output peak voltage 5kv-12kv continuously adjustable frequency of 8k Hz, pulse width duty cycle 16% ~ 20% adjustable. Through the observation of the discharge test results, the indicators of this power supply are running normally, working steadily, electromagnetic interference is small, and has good application value.