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本文提出了压电晶体（ＰＺＴ）位移物曲线自动干涉测量方法，该方法利用干涉仪把ＰＺＴ的微位移量转化成干涉条纹相位变化量，通过快速傅里叶变换（ＦＦＴ）方法自动复原干涉条纹中包含的相位的变化量，从而高精度地检测出ＰＺＴ的位移特性曲线根据该方法，利用ＣＣＤ摄象机、图象板和干涉仪组合成一套光、机、电一体化的微位移自动测试系统，实际测量了我们研制的ＰＺＴ随电压变化的位移特性曲线实验表明，该方法原理实现简单，且能实现高精度、自动、实时和动态测量
In this paper, an automatic interferometric method for piezoelectric crystal (PZT) displacement curve is proposed. This method uses the interferometer to convert the micro displacement of PZT into the interference fringe phase variation, and automatically restores the interference fringes by means of fast Fourier transform (FFT) According to the method, a CCD camera, a picture board and an interferometer are combined to form a set of optical, mechanical and electrical integrated micro-displacement automatic The test system actually measured the displacement characteristics of PZT with voltage changes. Experiments show that this method is simple in principle and can realize high precision, automatic, real-time and dynamic measurement.