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利用射频磁控溅射法首次在室温水冷柔性衬底PET上制备出了可见光透过率高、电阻率低的掺锆氧化锌(ZnO:Zr)透明导电薄膜。X射线衍射和扫描电子显微镜表明,ZnO:Zr薄膜为六角纤锌矿结构的多晶薄膜,且具有平行于衬底方向的择优取向。实验获得ZnO:Zr薄膜的最小电阻率为1 .55×10-3Ω.cm。实验制备的ZnO:Zr薄膜具有良好的附着性能,其可见光区平均透过率超过90 %。
The radio-frequency magnetron sputtering method was used for the first time to prepare a ZnO-Zr transparent conductive film with high visible light transmittance and low resistivity at room temperature water-cooled flexible PET substrate. X-ray diffraction and scanning electron microscopy show that the ZnO: Zr films are polycrystalline films with hexagonal wurtzite structure and have the preferred orientation parallel to the substrate. The minimum resistivity of ZnO: Zr thin film obtained experimentally is 1.555 × 10-3Ω.cm. The experimentally prepared ZnO: Zr films have good adhesion, with an average transmittance in the visible region of over 90%.