Numerical simulation of effects of cusp magnetic field on oxygen concentration of 300 mm CZ-Si

• 作 者: WANG Yongtao XU Wenting DAI
• 机 构: SemiconductorMaterialsCo.,GeneralResearchInstituteforNonFerrousMetals
• 出 处: 稀有金属：英文版
• 发表日期: 2012年5期
• 关键词: MCZ 硅 尖顶磁性 氧集中 数字模拟 Computer simulationMagnetic fieldsSilicon
• 基金项目: This project was supported by the Major National Science & Technology Program of China

In magnetic Czochralski (MCZ) silicon growth,the distance and diameter of the electrified coils may affect the magnetic field intensity and melt flow.By changing the above parameters,the optimum geometric configuration of the coils was attempted.Through a