美国直接作图电子束曝光机生产的新动向

• 作 者: 吴健昌
• 出 处: 微细加工技术
• 发表日期: 1985年04期
• 关键词: 电子束 Varian 从业人员 可靠性 开发过程 四年 超高速集成电路 间接经济损失 Elmer 技术改造

1、美国Varian公司的曝光机生产部(Lithography Production Division)近四年来一直从事开发的直接作图电子束曝光机,由于可靠性差,销路不好,最近已停止生产,从事此项工作的曝光机生产部已于最近解散,190名从业人员中已有110人解雇,剩下的80人也将于最近解雇。

1, the United States Varian’s lithography Production Division (Lithography Production Division) has been engaged in the development of direct drawing electron beam exposure machine for nearly four years, due to poor reliability, poor sales, has recently stopped production, exposure to engage in this work machine The Ministry of Production has recently been dissolved and 110 of the 190 employees have been laid off and the remaining 80 will be laid off recently.