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采用直流反应磁控溅射法,以高纯Ti为靶材,高纯O2为反应气体,制备了TiO2薄膜.研究了氧气流量对薄膜结晶取向、表面形貌和光学性能的影响.研究发现,TiO2薄膜主要呈锐钛矿TiO2(101)择优取向,当氧气流量较小时,薄膜中还含有金属Ti(100),氧气流量较大时,薄膜含TiO2(101)和TiO2(004),成多晶态;薄膜的粗糙度和颗粒大小都随氧气流量的增大而增大;薄膜在400～1 100nm可见-近红外波段有较高的透射率并且其吸收峰随着氧气流量的增大而红移,当氧气流量为5sccm时,平均透射率最高.
The effects of oxygen flux on the crystal orientation, surface morphology and optical properties of the films were investigated by direct current reactive magnetron sputtering with high purity Ti as target and high purity O2 as reactant gases. The TiO2 film is predominantly anatase TiO2 (101). When the flow rate of oxygen is small, the film also contains Ti (100). When the flow rate of oxygen is large, the films contain TiO2 (101) and TiO2 Crystalline state; the roughness and particle size of the films both increase with the increase of the oxygen flow rate; the films have higher transmittance in the visible-near-infrared range from 400 to 1 100 nm and the absorption peak increases with the oxygen flow rate Redshift, with an oxygen flow rate of 5 seem, the average transmittance is highest.