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探测技术是最近几年受重视的技术课题。本文介绍了我所研制的TZ—3型自动多探针的技术性能、结构设计等,并对一些工艺要求作了探讨。
Probing technology has been the subject of much attention in recent years. This article describes the TZ-3 automatic multi-probe technology performance, structural design, etc., and some of the technical requirements were discussed.