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Specimens of Ti6Al4V alloy were implanted with nitrogen ions of 4× 1018 cm-2 at temperatures from 100 to 600℃. Auger Electron Spectroscopy (AES),microhardness measurements and pin-on-disk wear testing, Scanning Electron Microscopy (SEM), and Glancing angle X-ray Diffraction (XRD) were utilized to evaluate the surface property improvements. The thickness of implanted layers increased by about an order of magnitude when the temperature was elevated from 100 to 600℃.Higher surface hardness and wear resistance were also obtained in the high temperature implantation. The XRD image showed the presence of nitrides of titanium at the implanted surface.