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用ＰＥＣＶＤ方法制备出二氧化锡薄膜，利用双探针技术诊断出等离子体反应器内电子密度的分布，并分析了它对薄膜电阻的影响．透射电镜分析表明随沉积温度升高，二氧化锡薄膜从非晶态转变为多晶态，其电阻率随之减小．掺锑的二氧化锡薄膜对石油液化气和酒精具有良好的气敏效应
The SnO2 thin film was prepared by PECVD method. The distribution of electron density in the plasma reactor was diagnosed by dual probe technique and its influence on the sheet resistance was analyzed. Transmission electron microscopy analysis showed that as the deposition temperature increases, the SnO2 thin film changes from amorphous to polycrystalline and its resistivity decreases. Antimony-doped tin oxide films have a good gas-sensing effect on liquefied petroleum gas and alcohol