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用化学方法配合适当的真空退火工艺制备了具有较好电、光相变性能的VO2粉末。分析了经过不同真空退火工艺处理所得试样的XRD、XPS谱图、相变性能,得到了真空退火温度与VO2粉末相变性能之间的关系。
VO2 powder with good electrical and optical phase change properties was prepared by chemical method with the appropriate vacuum annealing process. The XRD and XPS spectra of the samples obtained after different vacuum annealing processes were analyzed. The relationship between the vacuum annealing temperature and the phase transformation properties of VO2 powders was obtained.