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分别采用热丝辅助反应溅射和等离子体增强热丝化学气相沉积的制备方法，制备出含有β-C3N4晶相的CNx薄膜．本文将重点报道CNx薄膜的结构与形貌特点，并进一步阐述制备参数与CNx薄膜中β-C3N4结晶成分的关系．
CNx films containing β-C3N4 crystal phase were prepared by hot wire assisted reactive sputtering and plasma enhanced hot filament chemical vapor deposition respectively. In this paper, we will focus on the structure and morphology of CNx thin films, and further elaborate the relationship between the preparation parameters and the β-C3N4 crystal composition in CNx films.