论文部分内容阅读
对于含有载频条纹的干涉图,在垂直干涉条纹方向利用空间扫描方法,将干涉图幅照度数值化,通过傅里叶变换算法复原波面。本文在阐述上述原理和实验验证基础上,着重讨论灰度量化等级、载频频率、数字化采样点数、象素矩阵、波面形状等有关参数与方法原理误差的关系。对于虚拟理想干涉图分析计算表明:在优选诸参数情况下,方法的原理误差约为λ/50～λ/100。
For interference fringes with carrier frequency fringes, spatial illumination method is used in the direction of vertical fringes to digitize the illuminance of the interference fringes, and the wavefronts are restored by the Fourier transform algorithm. Based on the above principle and experimental verification, this paper focuses on the relationship between gray quantization level, carrier frequency, digitized sampling points, pixel matrix, wavefront shape and other related parameters and the principle error of the method. The analysis of the virtual ideal interferogram shows that the principle error of the method is about λ / 50 ~ λ / 100 under the optimal parameters.