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微悬臂是原子力显微镜中最重要的部件之一。用压电微悬臂代替常用的Ｓｉ、ＳｉＯ２或Ｓｉ３Ｎ４微悬臂后的原子力显微镜有一些独特的优点。由于压电微悬臂中的压电薄膜具有压电效应，因此它既可致动微悬臂，又可探测微悬臂的位移量，使得原子力显微镜的结构简单、响应速度快、扫描速度加快。文中简要介绍了压电微悬臂的制作过程，分析了压电微悬臂在原子力显微镜中的各种应用及相应的原子力显微镜的工作原理和有关结果，并与普通原子力显微镜进行了比较。
Micro-cantilever is one of the most important parts in AFM. There are some unique advantages of using a piezoelectric micro-cantilever instead of the common Si, SiO2 or Si3N4 micro-cantilever AFM. Because of the piezoelectric effect of the piezoelectric film in the piezoelectric micro-cantilever, it can actuate the micro-cantilever and detect the displacement of the micro-cantilever so that the atomic force microscope has the advantages of simple structure, fast response and high scanning speed. In this paper, the fabrication process of piezoelectric micro-cantilever is briefly introduced. The application of piezoelectric micro-cantilever in atomic force microscope and the corresponding working principle and related results of atomic force microscope are analyzed. The comparison is made with the common atomic force microscope.