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利用中频非平衡磁控溅射技术在单晶硅基底上沉积了类石墨碳膜,采用Raman光谱、高分辨透射电子显微镜、原子力显微镜分析了薄膜微观结构和表面形貌;采用纳米压痕仪和CSM摩擦磨损试验机测试了碳膜力学性能和摩擦学性能.结果表明:利用中频非平衡磁控溅射技术沉积的碳膜是一种以sp~2键合碳为主、结构非晶、硬度适中、应力较低、表面粗糙度较大、摩擦性能优异的薄膜.脉冲占空比对薄膜微观结构和性能有显著影响,随着脉冲占空比的增大,Raman光谱D峰和G峰的强度比ID/IG先减小后增大,而硬度随脉冲占空比的增大却呈现出相反的变化趋势,即先增大后减小;大气氛围中的摩擦性能测试表明,本实验制备的薄膜具有优异的抗磨性能(～10~(-11)cm~3/N~(-1)·m~(-1))和承载能力(～2.5 GPa).随脉冲占空比的增大,薄膜摩擦系数变化甚微而磨损率却呈现先显著减小后轻微增大的变化趋势.类石墨碳膜优异的摩擦学性能主要归因于其独特的结构、较低的内应力及良好的结构稳定性.
Graphite carbon films were deposited on single crystal silicon substrates by IF unbalance magnetron sputtering. The Raman spectra, high resolution transmission electron microscopy and atomic force microscopy were used to analyze the microstructure and surface morphology of the films. Nanoindenter and CSM friction and wear tester was used to test the mechanical properties and tribological properties of the carbon film.The results show that the carbon film deposited by IF unbalance magnetron sputtering is a kind of carbon film mainly composed of sp ~ Moderate, low stress, high surface roughness and excellent friction performance.The pulse duty cycle has a significant effect on the microstructure and properties of the films, with the pulse duty cycle increases, the Raman peak D and G peak The intensity ratio ID / IG decreases first and then increases, while the hardness shows an opposite trend with the increase of pulse duty cycle, that is, increases first and then decreases; the friction performance test in the atmosphere shows that the experimental preparation Has excellent wear resistance (~ 10 ~ (-11) cm ~ 3 / N ~ (-1) · m ~ (-1)) and bearing capacity (~ 2.5 GPa) with increasing pulse duty cycle Large, thin film friction coefficient changes little wear rate but showed a significant decrease after a slight increase Trend. Graphite-like carbon film is excellent in tribological properties primarily due to its unique structure, low stress and good structural stability.