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一 引言 在半导体分立器件基础上发展起来的集成电路,经历了小规模、中规模和大规模集成电路(以下简称LSI)之后,现正进入超大规模集成电路(VLSI)阶段。集成电路愈是发展,对超净、超纯和微细加工的要求也愈加突出,即对环境的依赖性也随之增大。 LSI、VLSI是一项在一定程度上代表国家科学技术现代化水平的涉及面很广的综合性技术。其环境性首先表现在依赖于发达的文化教育、强大的科学技术、雄厚的工业基础和发达的交通运输,其次表现为要求有良好的气象和适宜的水质、水源、动力等项自然条件,而总的经济效益则与上述诸条件的综合结果密切相关。
I. INTRODUCTION Integrated circuits developed on the basis of discrete semiconductor devices have entered the VLSI stage after they have experienced small-, medium- and large-scale integrated circuits (LSIs). The more integrated circuits are developed, the requirements for ultra-clean, ultra-pure, and microfabricated processes are becoming more pronounced, ie, their dependence on the environment also increases. LSI, VLSI is a comprehensive and comprehensive technology that represents, to a certain extent, the level of national science and technology modernization. Its environmental performance first depends on the developed culture and education, strong science and technology, strong industrial base and developed transport, followed by the performance of a good weather and appropriate water quality, water, power and other natural conditions, and The overall economic benefits are closely related to the above comprehensive results of the above conditions.