论文部分内容阅读
介绍了用于新型陀螺仪上一种转子顶部刻线的光学信号读取系统,讨论了利用光刻技术制作信号读取图形的方法,并给出图形制作结果。结果表明,该方法可用于新型陀螺仪信号读取图形的制作并能提高图形制作的精度。
An optical signal reading system for the engraving of a rotor top on a new type of gyroscope is introduced. The method of making a signal reading pattern by using lithography is discussed, and the result of drawing is given. The results show that this method can be used to generate the new type of gyroscope signal read graph and improve the precision of the graph production.