论文部分内容阅读
采用溶胶-凝胶法制备了Ba0.5Sr0.5NbzTi1-zO3薄膜(Nb=0-4.12mol%),采用HPAgilent 429A阻抗分析仪等测试方法研究了微量元素铌对Ba0.5Sr0.5NbzTi1-zO3(BSNT)薄膜介电性能的影响。当Nb分别为0-4.12mol%时,相对介电常数rε降低而介质损耗tanδ均得到了改善,当测试频率为1kHz,tanδ由0.09降低到0.067;居里温度Tm逐渐移向低温;在测试频率2.0-10MHz范围内,rε、tanδ均能表现出较好的频散特性。采用XRD、TEM等测试方法分析了薄膜的结构特征。薄膜为四方钙钛矿晶体结构,但Nb的溶入改变了晶胞参数的c/a比,减小了薄膜的晶粒尺寸,提高了薄膜的致密度。
The Ba0.5Sr0.5NbzTi1-zO3 thin film (Nb = 0-4.12mol%) was prepared by sol-gel method. The effect of microelement niobium on the growth of Ba0.5Sr0.5NbzTi1-zO3 (BSNT Effect of Dielectric Properties. When Nb is 0-4.12mol%, the relative dielectric constant rε decreases and the dielectric loss tanδ are improved. When the test frequency is 1kHz, the tanδ decreases from 0.09 to 0.067, the Curie temperature Tm gradually moves to low temperature, Frequency 2.0-10MHz range, rε, tanδ can show better dispersion characteristics. The structural characteristics of the films were analyzed by XRD and TEM. The film is tetragonal perovskite crystal structure, but the dissolution of Nb changes the c / a ratio of the unit cell parameters, decreases the grain size of the film and improves the density of the film.