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二极管激光器泵浦模块输出光束发散角小、指向精度高,但其中的快轴准直(FAC)微透镜装调工艺不能满足大功率模块的应用要求,针对此问题,分析了快轴准直微透镜的光束准直原理,简述了应用FAC透镜时的参数选择和装调问题。通过光学成像方法实时监测二极管激光巴条(bar)的近场像和远场像,对FAC透镜分别进行粗调节和细调节,获得了20个巴条连续输出2 kW垂直阵列二极管激光快轴准直光束远场发散角(1/e2)4.4 mrad、巴条间准直光束指向精度不大于±1.7 mrad的准直效果。最后,结合垂直阵列二极管激光器的封装流程,对影响阵列快轴光束准直效果的因素进行了分析,指出了下一步工艺优化的重点。
In the diode laser pump module, the output beam divergence angle is small and pointing accuracy is high. However, the fast axis alignment (FAC) micro-lens assembly process can not meet the application requirements of high-power modules. In response to this problem, the fast axis collimation The beam collimation principle of the lens, briefly describes the parameter selection and setup problem when using the FAC lens. Real-time monitoring of the near-field and far-field images of the diode laser bar by optical imaging method were used to coarsely adjust and fine-tune the FAC lens respectively, obtaining 20 bar continuous output 2 kW vertical array diode laser fast axis The far-field divergence angle (1 / e2) of the straight beam is 4.4 mrad and the alignment accuracy of the collimated beam between the bars is not greater than ± 1.7 mrad. Finally, combined with the vertical array diode laser packaging process, the impact of the array fast axis beam collimation effect of the factors are analyzed, point out the next process optimization priorities.