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在超声波换能器制造标准中规定超声波换能器的标称频率与其实际回波中心频率的误差不能超过±10%。在超声波换能器设计生产中,这是一个比较难以控制的指标。本文提出了用驻波理论设计出一个物理模型,将粘接后的保护膜与晶片看作一个整体,晶片中激发的超声波在这个整体中形成驻波。对给定频率的晶片可以用保护膜的厚度来控制探头的回波频率,减小保护膜的厚度,将提高探头回波中心频率,增加保护膜的厚度,将降低探头的回波中心频率。
The ultrasonic transducer manufacturing standards provide that the ultrasonic transducer nominal frequency and the actual echo center frequency error can not exceed ± 10%. In ultrasonic transducer design and production, this is a more difficult to control the indicator. In this paper, we propose to design a physical model based on the theory of standing waves. The bonded protective film and the wafer are regarded as a whole. The excited ultrasonic wave in the wafer forms a standing wave in the whole body. For a given frequency chip thickness of the protective film can be used to control the probe’s echo frequency and reduce the thickness of the protective film will increase the probe echo center frequency and increase the thickness of the protective film will reduce the probe’s echo center frequency.