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一、概况为了提高塑料的附加功能,进一步扩大塑料用途,利用真空镀膜技术对塑料表面进行处理是一个好办法。目前常用的塑料真空镀膜方法有真空蒸镀法和磁控溅射法。所谓蒸镀法就是在10~(-4)～10~(-5)Torr的真空中加热蒸镀材料,使其在极短时间内蒸发并沉积在基材表面形成镀膜层。一般,该法只能蒸镀像铝这样的低融点金属。磁控溅射法利用高效磁控管溅
I. Overview In order to enhance the additional function of plastic, to further expand the plastic use, the use of vacuum coating technology for plastic surface treatment is a good way. At present, the commonly used plastic vacuum coating methods are vacuum evaporation method and magnetron sputtering method. The so-called evaporation method is in 10 ~ (-4) ~ 10 ~ (-5) Torr vacuum heating evaporation material, make it in a very short period of time evaporated and deposited on the surface of the substrate to form a coating layer. Generally, this method can only deposit low melting point metal such as aluminum. Magnetron sputtering method using efficient magnetron sputtering