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用ＭＯＣＶＤ方法制备ＺｎＳ：Ｍｎ薄膜，研究了薄膜中锰浓度与ＴＣＭ源温度、衬底温度及ＴＣＭ源流量之间的关系。以ＭＯＣＶＤ方法生长的ＺｎＳ：Ｍｎ薄膜为发光层，制备了双绝缘层结构的交流薄膜电致发光显示器。
The ZnS: Mn thin films were prepared by MOCVD. The relationship between the concentration of manganese in the thin films and the source temperature of TCM, the substrate temperature and the source current of TCM were studied. The ZnS: Mn thin film grown by MOCVD method is a light emitting layer, and an AC thin film electroluminescent display with a double insulation layer structure is prepared.