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利用准纵波模式在 Li Nb O3 基片上制作了能有效地检测溶液成分的实验性声传感器.准纵波模式的优点是声波速度快,波长长,声波能量能透入基片深处,因此可以从基片背面检测液体,简化了通常 S A W 传感器复杂的封装结构,有利于实用化.
An experimental acoustic sensor that can effectively detect the solution composition was fabricated on the Li Nb O3 substrate by using pseudo-longitudinal wave mode. The advantages of quasi-longitudinal wave mode are that the wave speed is fast and the wave length is long. The acoustic energy can penetrate deep into the substrate. Therefore, the liquid can be detected from the back of the substrate, which simplifies the conventional S A W sensor package structure and is practical.