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为克服串联式和现有并联式二维柔性微动平台的不足,基于Stewart并联机构思想来设计二维并联柔性微动平台的新构型。首先,基于结构简单紧凑、固有频率高、便于传感器安装等要求,采用Stewart并联机构并对其进行相应的结构改变,设计出了具有对称双圆弧薄板式弹性单元体的2-DOF并联柔性结构微动平台新构型;其次,采用有限元方法对平台的尺寸参数进行了优化,并对其静动态特性进行了仿真分析;最后,通过试验对平台的性能进行了测试。结果表明:在150 V电压下时,平台x和y方向的位移分别为22.88μm和23.25μm;平台x和y方向的固有频率分别为1.712 k Hz和1.706 k Hz;在10 N的阶跃输入力作用下,平台x和y方向的响应时间均约为20 ms。
In order to overcome the shortcomings of tandem and existing parallel two-dimensional flexible fretting platform, a new configuration of two-dimensional parallel flexible fretting platform is designed based on the idea of Stewart parallel mechanism. Firstly, the Stewart parallel mechanism is adopted and the corresponding structural changes are made based on the simple and compact structure, high natural frequency and easy installation of the sensor. A 2-DOF parallel flexible structure with a symmetrical double-arc thin plate elastic unit is designed Secondly, the size parameters of the platform are optimized by finite element method, and the static and dynamic characteristics of the platform are simulated and analyzed. Finally, the performance of the platform is tested through experiments. The results show that the displacements in the x and y directions are 22.88μm and 23.25μm respectively at 150 V; the natural frequencies in the x and y directions of the platform are 1.712 kHz and 1.706 k Hz respectively; at 10 N step input Under the force, the response time of the platform in the x and y directions is about 20 ms.