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本文介绍了一种光纤纳米级分辨率的非接触式测量系统。对实验的设置、噪声和时频响应进行了具体介绍和分析。实验设置包括一项减小激光源波动的技术。并用一个分辨率为1.25nm的激光干涉仪(AXIOM2/20)来监控的线性低电压压电陶瓷驱动台进行标定。光纤传感器具有从50到150μm稳定的准线性测量范围。
This article describes a non-contact optical fiber nanometer resolution measurement system. The experimental setup, noise and time-frequency response were specifically introduced and analyzed. The experimental setup includes a technique to reduce laser source fluctuations. And calibrated with a linear low voltage piezo-ceramic drive stage monitored with a 1.25 nm laser interferometer (AXIOM2 / 20). Fiber optic sensors have a stable, quasi-linear measurement range from 50 to 150 μm.