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据报道,日前美国Rensselaer工艺学院的研究小组使用碳纳米管技术成功开发出了微型气体传感器。该传感器宽约20mm,长约20mm,厚约700μm,体积小且结构简单。首先用化学气相淀积法(CVD)在二氧化硅(SiO~2)基板上生成多层碳纳米管(MWCNT)。MWCNT的直径约25～30nm,长约30μm,排列间隔约为50nm。然后在MWCNT两端加上厚约180μm的绝缘玻板,最后再用铝膜覆盖起来,气体传感器即制作完成。
According to reports, a few days ago the United States Rensselaer Institute of Technology team successfully developed a carbon nanotube micro gas sensor. The sensor is about 20mm wide, about 20mm long, about 700μm thick, small in size and simple in construction. First, multi-walled carbon nanotubes (MWCNTs) are formed on a silicon dioxide (SiO 2) substrate by chemical vapor deposition (CVD). MWCNT diameter of about 25 ~ 30nm, length of about 30μm, the arrangement interval of about 50nm. Then add MWCNT at both ends of the insulating glass about 180μm, and finally covered with aluminum film, the gas sensor that is made.