Microstructure and mechanical properties of TiN/AlN multilayers deposited by filtered vacuum arc dep

• 作 者: ZHANG Xu ZHANG Hui-xing ZHANG
• 机 构: KeyLaboratoryofBeamTechnologyandMaterialModificationofMinistryofEducation
• 出 处: 中国有色金属学会会刊：英文版
• 发表日期: 2004年z1期
• 关键词: MULTILAYER filtered ARC NANOMETER WEAR
• 基金项目: Project(50141022) supported by the National Natural Science Foundation of China

Nanometer TiN/AlN multilayers were prepared on silicon substrate by filtered vacuum arc deposition.The structures of the nanometer TiN/AlN multilayer were studied by using X-ray diffraction. The 12 nm TiN/AlN multiplayer is composed of cubic TiN structure