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综述了近年来纳米氧化锌材料p型掺杂改性的研究现状,介绍了用于p型掺杂的单元素和共掺杂双元素以及所采用的主要掺杂方法,这些方法包括热蒸发法、喷雾热解法、溶胶-凝胶法、低温水解法、离子束增强沉积法、脉冲激光沉积法和磁控溅射法等。探讨了掺杂后的氧化锌在光电磁以及p型稳定性等方面表现出的新特性,介绍了p型氧化锌薄膜在紫外探测器和太阳电池方面的应用,对p型氧化锌薄膜未来的发展进行了分析和预测,认为制备稳定、低电阻率和高载流子浓度的p型氧化锌薄膜是今后研究的重点。
In this paper, the research status of p-type doping modification of nanometer zinc oxide materials in recent years is reviewed. Single and co-doped doping elements for p-type doping as well as the main doping methods adopted are introduced. These methods include thermal evaporation , Spray pyrolysis, sol-gel, cryogenic hydrolysis, ion beam enhanced deposition, pulsed laser deposition and magnetron sputtering. The new characteristics of doped ZnO in the fields of photoelectromagnetism and p-type stability were discussed. The application of p-type zinc oxide thin film in UV detector and solar cell was introduced. The future of p-type zinc oxide thin film Development of the analysis and prediction, that the preparation of stable, low resistivity and high carrier concentration of p-type zinc oxide film is the focus of future research.