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介绍了确定纳米精度双频激光干涉仪非线性误差的两种方法：纳米比对方法和幅值估算方法，前者通过将双频激光干涉仪和计量院纳米精度F-P干涉仪进行纳米比对确定非线性误差，具有测量结果直接和米定义溯源的优点；后者通过测定偏振干涉仪测量信号的幅值调制度估算非线性误差，具有简单易行、受外界因素干扰小等优点。实验结果表明，对于此干涉仪系统，非线性误差的测量结果小于2．5nm，估算结果为1．4nm，两者在误差允许的范围内一致。
Two methods to determine the nonlinear error of the nanometer precision dual-frequency laser interferometer are introduced: the method of nanometer comparison and the method of amplitude estimation. The former method uses the dual-frequency laser interferometer and the nanometer precision FP interferometer of the metrology institute to determine the non- The linearity error has the advantage that the measurement result directly defines the traceability with the meter. The latter measures the nonlinearity error by measuring the amplitude modulation degree of the polarization interferometer measurement signal, which is simple and easy to be interfered by external factors. The experimental results show that for this interferometer system, the measurement of nonlinear error is less than 2.5nm and the estimated result is 1.4nm, both of which are consistent within the allowable error range.