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对140GHz带状注弯折波导的色散特性和耦合阻抗进行了仿真。CST微波工作室的仿真表明该波导在140GHz时,波导内电磁波的轴向相速度为0.227c,且140GHz频率附近色散特性平坦。波导的耦合阻抗在140GHz时为5Ω左右。CST粒子工作室注波互作用的仿真结果表明该弯折波导在140GHz处的功率增益为24.6dB。该弯折波导带状电子注的设计保证了该波导的加工工艺与MEMS微加工工艺兼容。通过SU-8UV-LIGA工艺实现了对该波导的微型加工。测试结果表明该波导的反射损耗S11与插入损耗S21分别为-28dB和-1.2dB。实测的输出功率增益达到23dB。测试结果和仿真结果的一致性表明该弯折波导设计的合理性,同时也验证了多步SU-8UV-LIGA工艺可以实现对该波导的高精度加工。
The dispersion characteristics and coupling impedance of a 140GHz strip-bent waveguide are simulated. The simulation of CST microwave studio shows that the axial phase velocity of the electromagnetic wave in the waveguide is 0.227c at 140GHz and the dispersion characteristic is flat near the frequency of 140GHz. The coupling impedance of the waveguide is about 5Ω at 140GHz. The simulation results of the CST particle studio wave injection interaction show that the bent waveguide has a power gain of 24.6dB at 140GHz. The design of the bent waveguide ribbon electron injection ensures that the processing of the waveguide is compatible with the MEMS micro-fabrication process. Micro-machining of this waveguide is achieved by the SU-8UV-LIGA process. The test results show that the waveguide’s reflection loss S11 and insertion loss S21 are -28dB and -1.2dB, respectively. The measured output power gain of 23dB. The consistency between the test results and the simulation results shows the rationality of the flexural waveguide design, and also verifies that the multi-step SU-8UV-LIGA process can realize high-precision machining of the waveguide.