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介绍一种能同时测量物理量和化学量的多功能传感器集成片.该多功能片的尺寸为8×9mm,它包括用于信号调节、阵列存取和输出缓冲的一般的MOS器件以及如下的片上传感器:气体流量传感量,红外敏感阵列,化学反应传感器,悬臂梁加速度计,SAW蒸汽传感器,触觉传感器阵列和红外电荷耦合器成象器.该片的多种敏感功能是利用ZnO薄膜的热电和压电效应,该片是采用一般的3μm Si NMOS工艺并结合Si的微机械加工技术制成的.本文着重介绍这些兼容性制造技术和传感器的特性.
A versatile sensor chip that measures both physical and chemical quantities simultaneously is introduced. The multi-function chip measures 8 x 9 mm in size and includes the typical MOS devices for signal conditioning, array access and output buffering, and on-chip Sensors: Gas Flow Sensing, Infrared Sensitive Arrays, Chemical Reaction Sensors, Cantilever Accelerometers, SAW Steam Sensors, Tactile Sensor Arrays, and Infrared Charge Coupled Imagers. A variety of sensitive features of the film utilize the thermoelectric power of ZnO thin films And Piezoelectric Effect, which is made using a typical 3μm Si NMOS process in combination with Si’s micromachining technology.This article focuses on the features of these compatible manufacturing techniques and sensors.