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介绍了高品质因子(Q)回音壁模式(WGM)Si O2光学微球腔和锥形光纤耦合器的制备方法。应用窄线宽(300 kHz)单模NewFocus可调谐激光器(1520~1570 nm)作为激发光源,使用直径1.2μm锥形光纤激发直径150μm的Si O2微球腔的光学模式,得到了其形貌共振谱线。从微球腔的温度分布出发,结合Si O2材料的热膨胀以及热光效应折射率变化机理,分析了微球腔在高功率光激发下热效应引起的共振谱平移(2.5 GHz/℃)。实验表明,控制WGM激发功率,可有效抑制微球腔的热效应,且易于实现稳定的高Q模式。调整锥形光纤耦合激发角度,可以较好地抑制微球腔高阶模式,测得其共振谱线宽为22 MHz,对应的微球腔Q值为107。
The preparation method of high quality factor (Q) whispering gallery mode (WGM) Si O2 optical microsphere cavity and tapered fiber coupler is introduced. Using the narrow linewidth (300 kHz) single-mode NewFocus tunable laser (1520 ~ 1570 nm) as the excitation light source, the optical mode of Si O2 micro-sphere with a diameter of 150 μm was excited by a 1.2 μm diameter tapered optical fiber, Spectral line. Based on the temperature distribution of the microsphere cavity and the thermal expansion of the Si O2 material, and the mechanism of the refractive index change of the thermo-optic effect, the resonant spectrum shift (2.5 GHz / ℃) caused by the thermal effect of the microsphere cavity under high-power light excitation was analyzed. Experiments show that the control WGM excitation power, can effectively inhibit the thermal effects of the micro-cavity, and easy to achieve stable high-Q mode. By adjusting the angle of taper fiber coupling excitation, the high-order mode of the microsphere can be well suppressed. The measured resonance linewidth is 22 MHz and the Q value of the corresponding microsphere is 107.