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An electrochemical quartz crystal impedance system (EQCIS) which allows rapid and simultaneous measurements of admittance spectra of piezoelectric quartz crystal resonance during electrochemical processes was developed by combining an HP 4395A Network/Spectrum/Impedance analyzer with an EG & G M283 potentiostat. Non-linear least square regression analyses of simultaneously acquired conductance and susceptance data were discussed in detail, giving that Rm, Cs, 1/Cm (or Lm) and f0 as estimation parameters is the best choice among various fitting routines. Equivalent electrical circuit parameters of quartz crystal resonance during electrodeposition of silver and polyaniline and electrochemical processes of the deposits were obtained and discussed according to changes in electrode mass, electrode surface roughness and film conductivity etc. The significant changes of motional resistance Rm and static capacitance Cs observed in the silver case was believed to result mainly from changes in electrode surface r