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以锆酸丙酯[Zr(OPr)4]、正硅酸乙酯(TEOS)为原料,用溶胶-凝胶提拉法涂膜,制备了高透过的λ/4-λ/4型ZrO2/SiO2双层减反膜。以锆酸丙酯为前驱体,乙酰丙酮为络合剂,在盐酸的催化条件下,于乙醇溶剂中水解制备ZrO2溶胶。ZrO2溶胶具有很好的稳定性。制备的双层减反膜具有很好的减反效果,在石英玻璃基片二面涂膜,在激光三倍频波长351nm处透过率达到99.41%,在BK-7光学玻璃基片上涂制的双减反层膜在基频波长1053nm处透过率达到99.63%。该减反膜的均方根粗糙度(RMS)为1.038nm。膜层具有较高的激光损伤阈值,在激光波长为1064nm,脉冲宽度为1ns时,ZrO2膜的激光损伤阈值为19.6J/cm2,双层减反膜的激光损伤阈值为16.8J/cm2。
Highly permeable λ / 4-λ / 4 ZrO2 was prepared by sol-gel method using propyl zirconate [Zr (OPr) 4] and tetraethyl orthosilicate (TEOS) as raw materials / SiO2 double antireflective film. With zirconium propionate as precursor and acetylacetone as complexing agent, ZrO2 sol was prepared by hydrolysis in ethanol solvent under the catalysis of hydrochloric acid. ZrO2 sol has good stability. The prepared double-layer antireflective film has a good anti-reflection effect. On the two sides of the quartz glass substrate, the transmittance is 99.41% at the wavelength of 351 nm of the laser and is coated on the BK-7 optical glass substrate The double-subtracted antireflective film has a transmittance of 99.63% at a fundamental frequency of 1053 nm. The anti-reflection film had a root mean square roughness (RMS) of 1.038 nm. The laser damage threshold of ZrO2 film is 19.6J / cm2 and the laser damage threshold of double antireflection film is 16.8J / cm2 at a laser wavelength of 1064nm and a pulse width of 1ns.