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本文介绍了法国薄膜研究中心近期所从事的任意膜厚的研究成果:在宽带光学监控系统中,用实时工作的小型计算机,在每一层淀积之后,确定出实际淀积的膜厚,把误差考虑到下一层的淀积中去,修改监控的评价函数,从而可以保证下一层的淀积膜厚。这种逐层修正的办法可以避免镀膜过程中膜厚误差的累积效应。同样的方法也可以用来修正折射率的误差。所以这种宽带监控系统能够做到理想地监控,任何期望的宽带滤光片都可圆满地完成。
This paper presents the recent research done by the French Thin Film Research Center at any film thickness: in a broadband optical monitoring system, a small computer in real time is used to determine the actual deposited film thickness after each layer is deposited. The errors take into account the deposition of the next layer and modify the evaluation function of the monitoring so that the deposited film thickness of the next layer can be guaranteed. This layer-by-layer correction avoids the cumulative effect of film thickness error during the coating process. The same method can also be used to correct the refractive error. So this broadband monitoring system can be ideally monitored and any desired broadband filter can be satisfactorily completed.