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针对动物离体组织电生理检测的实际需求,设计并制备了一种以载玻片为基底,以微电极阵列为敏感元件,并将灌流装置集成一体的传感器芯片.采用微电子机械系统(MEMS)技术中的薄膜工艺完成了微电极阵列的制备,其导电层和绝缘层分别是铂和氮化硅.采用聚二甲基硅烷(PDMS)浇铸制成埋有管道的方形灌流槽.该传感器可保持离体组织的生理活性,同时实现电生理信号的64通道同步记录.整个芯片结构紧凑,接口简单,使用方便.对芯片的电学性能进行了研究,结果表明,通过在微电极表面电镀修饰铂黑,可有效降低其交流阻抗,提高信噪比.
In order to meet the actual needs of electrophysiological examination of isolated animal tissues, a sensor chip based on glass slides and using microelectrode arrays as sensing elements and integrating perfusion devices was designed and fabricated.Microelectromechanical systems (MEMS ) Technology in the thin film process to complete the preparation of microelectrode array, the conductive layer and the insulating layer are respectively platinum and silicon nitride, polydimethylsilane (PDMS) is cast to make a buried pipe filled square shaped groove. The sensor Can maintain the physiological activity of the isolated tissue, and simultaneously realize the electrophysiological signal of 64 channels of synchronous recording.The whole chip structure is compact, the interface is simple, easy to use.The electrical performance of the chip was studied, the results show that, by plating on the surface of the microelectrode Platinum black, which can effectively reduce the AC impedance, improve signal to noise ratio.