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微构龙科技(MST)致力于氢氟酸气相腐蚀工艺配套装置的研发和生产。氢氟酸气相腐蚀是介于干法腐蚀和湿法腐蚀之间的一种腐蚀薄二氧化硅的工艺手段,其原理是通过N2携带的方式,将一定配比的氢氟酸溶液转化成气态,对二氧化硅进行腐蚀,而反应的副产物,由N2带离腐蚀环境,使得腐蚀后的硅片表面保持洁净,不再需要任何清洗处理。微构龙科技有限公司取得了氢氟酸气相腐蚀装
Micro-Tech Long Technology (MST) is committed to hydrofluoric acid gas phase etching process supporting equipment research and development and production. Hydrofluoric acid gas phase etching is between the dry etching and wet etching a thin layer of silicon dioxide etching process, the principle is carried by the way N2, a certain ratio of hydrofluoric acid solution into a gaseous , The silicon dioxide is etched, and the byproduct of the reaction is separated from the corrosion environment by the N2 band, so that the surface of the silicon wafer after the etching is kept clean without any cleaning treatment. Micro-Long Technology Co., Ltd. made hydrofluoric acid vapor corrosion equipment