论文部分内容阅读
用化学气相沉积方法制备了金刚石薄膜 .在制备过程中 ,通过间歇式关闭甲烷气体 ,强化了氢对sp2 杂化碳原子的刻蚀 .用拉曼光谱和金相显微镜对薄膜进行了分析表征 .结果表明 ,氢对sp2 杂化碳原子的强化刻蚀并未影响金刚石薄膜的品质和微观结构 .这一结论说明 ,在金刚石薄膜中 ,sp2 杂化碳原子主要存在于金刚石晶粒表面和晶界碳原子之间 ,而不是以石墨或无定形碳颗粒为主要存在方式 .
A diamond film was prepared by chemical vapor deposition (CVD) method. During the process of preparation, the hydrogen gas was used to etch sp2 hybridized carbon atoms by intermittently closing the methane gas. The films were characterized by Raman spectroscopy and metallographic microscope. The results show that the hydrogen-enhanced etching of sp2 hybridized carbon atoms does not affect the quality and microstructure of the diamond thin films.This conclusion shows that sp2 hybridized carbon atoms mainly exist on the diamond grain surface and the grain boundaries Carbon atoms, rather than graphite or amorphous carbon particles as the main way of existence.