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本文讨论了用气体离子化淀积技术制作类金刚石薄膜的方法,并研究了使用乙炔气体时的工艺条件。薄膜的性能与加速电压、基片温度、磁感应强度等淀积条件密切相关。在合适的条件下薄膜的威氏硬度可大于蓝宝石,有良好的导热性,且在电绝缘、耐腐蚀性等方面均接近金刚石的性能。电子衍射图像表明,薄膜中含有微小的金刚石晶粒。
In this paper, the method of producing diamond-like carbon films by gas ionization deposition is discussed, and the process conditions of using acetylene gas are studied. The performance of the film is closely related to the deposition conditions such as acceleration voltage, substrate temperature and magnetic induction. Under suitable conditions, the film can have a greater Vickers hardness than sapphire, have good thermal conductivity, and are close to the properties of diamond in electrical insulation, corrosion resistance and the like. Electron diffraction images show that the film contains minute diamond grains.